A Thermochemical Process Using Expanding Plasma for Nitriding Thin Molybdenum Films at Low Temperature
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Engineering
سال: 2012
ISSN: 1947-3931,1947-394X
DOI: 10.4236/eng.2012.412109